Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Photonic Sensors
سال: 2015
ISSN: 1674-9251,2190-7439
DOI: 10.1007/s13320-015-0239-y